Modeling and Identification of the Non-linear Dynamics of a Piezoelectric Actuator-A Review
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Abstract
There is currently no exact dynamic model which predicts hysteresis and creeps in a piezoelectric actuator under varying operating conditions (increasing frequency and amplitude of input, time of operation, temperature effects), and is stable against uncertainties. Thus, research needs to be carried out to predict the hysteresis and creep on the modeling and identification of the non-linear dynamics of a piezoelectric actuator. It would aid the implementation of a model-based control algorithm such as the precise positioning of a nano-positioning.
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Navale, R. M., Patil, A. B. K., Minase, J. L., & Pandhare, A. P. (2021). Modeling and Identification of the Non-linear Dynamics of a Piezoelectric Actuator-A Review. SAMRIDDHI : A Journal of Physical Sciences, Engineering and Technology, 13(01), 59-64. https://doi.org/10.18090/samriddhi.v13i01.11
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Research Article
This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
References
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[28] Song, D. and Li, C., 1999, ‘Modeling of Piezo Actuators Nonlinear and Frequency Dependent Dynamics,’ Mechatronics, vol. 9, issue. 4, pp. 391-410.
[29] Banning, R., de Koning, W.L., Adriaens, H. and Koops, R., 2001, ‘State Space Analysis and Identi cation for a Class of Hysteretic Systems,’ Automatica, vol. 37, pp. 1883-1892.
[30] Nalluri, S. K., & Parasaram, V. K. B. (2015). Automating Software Builds with Jenkins: Design Patterns and Failure Handling. International Journal of Technology, Management and Humanities, 1(01), 16-33. https://doi.org/10.21590/ijtmh.01.02.03
[31] Yeh, T-J., Lu, S-W. and Wu, T-Y., 2006, ‘Modeling and Identi cation of Hysteresis in Piezoelectric Actuators,’ Journal of Dynamic Systems, Measurement and Control, vol. 128, pp. 189-196.
[32] Qin, Y. and Jia, R., 2018, ‘Adaptive Hysteresis Compensation of Piezoelectric Actuator using Direct Inverse Modeling Approach,’ Micro and Nano Letters, vol. 13, issue. 2, pp. 180-183
[33] Parali, L., Sari, A., Kilic, U., Sahin, O. and Pechousek, J., 2017, ‘Arti cial Neural Network Modeling of Piezoelectric Actuator Vibration using Laser Displacement Sensor,’ Journal of Electrical Engineering, vol. 68, issue. 5, pp. 371-377.
[34] Yong, Y.K., Aphale, S.S. and Moheimani, R., 2009, ‘Design, Identi cation and Control of Flexural based XY stage for Fast Nanopositioning,’ IEEE Transaction on Nanotechnology, vol. 8, issue. 1, pp. 46-52.
[2] Elftherious, E., 2012, ‘Nanopositioning for Storage Applications,’ Annual Review in Controls, vol. 36, pp. 244-252.
[3] Newcomb, C. and Flinn, I., 1982, ‘Improving the Linearity of Piezoelectric Ceramic Actuators,’ IEEE Electron Letters, vol. 18, issue. 11, pp.442-442.
[4] Kaizuka, H. and Siu, B., 1988, ‘A Simple way to Reduce Hysteresis and Creep when using Piezoelectric Actuator,’ Japanese Journal of Applied Physics, vol. 27, issue. 5, pp. L773- L776.
[5] Devasia, S., Eleftheriou, E. and Moheimani, S., 2007, ‘A Survey of Control Issues in Nanopositioning,’ IEEE Transaction on Control System Technology, vol. 15, issue. 5, pp. 802-823.
[6] Salapaka, S., Sebastian, A., Cleveland, J. and Salapaka, M., 2002, ‘High Bandwidth Nano- positioners: a Robust Control Approach,’ Review of Scienti c Instruments, vol. 73, issue. 9, pp. 3232-3241.
[7] Kuhnen, K. and Janocha, H., 1998, ‘Compensation of Creep and Hysteresis E ects of Piezoelectric Actuators with Inverse Systems,’ Proceedings of the 6th International Conference on New Actuators, Bremen, pp.309-312.
[8] Leang, K., Zou, Q., and Devasia, S., 2009, ‘Feedforward Control of Piezoactuators in Atomic Force Microscope Systems,’ IEEE Control Systems Magazine, vol. 29, pp. 70–82. [9] Preisach, E., 1935, ‘On the Magnetic After e ect,’ Zeitschrift für Physik A Hadrons and Nuclei, vol. 94, issue. 5-6, pp. 277-302.
[10] Krasnosekl’skii, M. and Pokrovskii, A., 1983, ‘Systems with Hysteresis,’ Moscow. Mayergoyz, I., 1985, ‘Mathematical Models of Hysteresis,’ Physical Review Letters, vol. 56, pp. 1518-1521.
[11] Wen, Y.K., 1976, ‘Method of Random Variation of Hysteresis Systems,’ ASCE Journal of Engineering Mechanics Division, vol. 102, issue. 2, pp. 249-263.
[12] Goldfarb, M. and Celanovic, N., 1997, ‘A Lumped Parameter Electromechanical Model for Describing the Non-linear Behaviour of Piezoelectric Actuators,’ Journal of Dynamic Systems Measurements and Controls: Transaction of ASME, vol. 119, pp.478-485.
[13] Adly, A. and Ha z, S., 1998, ‘Using Neural Networks in the Identification of Preisach-type Hysteresis Models,’ IEEE Transactions on Magnetics, vol. 34, issue. 3, pp. 629-635.
[14] Song, D. and Li, C., 1999, ‘Modeling of Piezo Actuators Nonlinear and Frequency Dependent Dynamics,’ Mechatronics, vol. 9, issue. 4, pp. 391-410.
[15] Banning, R., de Koning, W.L., Adriaens, H. and Koops, R., 2001, ‘State Space Analysis and Identi cation for a Class of Hysteretic Systems,’ Automatica, vol. 37, pp. 1883-1892.
[16] Yeh, T-J., Lu, S-W. and Wu, T-Y., 2006, ‘Modeling and Identi cation of Hysteresis in Piezoelectric Actuators,’ Journal of Dynamic Systems, Measurement and Control, vol. 128, pp. 189-196. [17] Ge, P. and Jouaneh, M., 1995, ‘Modeling Hysteresis in Piezoceramic Actuators,’ Precision Engineering, vol. 17, pp. 211-221.
[18] Ge, P. and Jouaneh, M., 1997, ‘Generalized Preisach Model for Hysteresis Nonlinearity of Piezoceramic Actuators,’ Precision Engineering, vol. 20, issue. 2, pp. 99-111.
[19] Hu, H. and Mrad, R, 2002, ‘On the Classical Preisach Model for Hysteresis in Piezoceramic Actuators,’ Mechatronics, vol. 13, issue. 2, pp. 85-94.
[20] Yu, Y., Xiaob, Z., Naganathan, N. and Dukkipati, R., 2002, ‘Dynamic Preisach Modeling of Hysteresis for the Pie- zoceramic Actuator System,’ Mechanism and Machine Theory, vol. 37, issue. 1, pp. 75-89.
[21] Zhu, Z. and Zhou, X., 2012, ‘A Novel Fraction Order Model for the Dynamic Hysteresis of Piezoelectrically Actuated Fast Tool Servo,’ Materials, vol. 5, issue. 12, pp. 2465-2485. Fett, T. and Thun, G., 1998, ‘Determination of Room-Temperature Tensile Creep of PZT,’ Journal of Materials Science Letters, vol. 17, issue. 22, pp. 1929-1931.
[22] Jung, H. and Gweon, D., 2000, ‘Creep characterization of piezoelectric actuator,’ Review of Scienti c Instruments, vol. 71, issue. 4, pp. 1896-1900.
[23] Croft, D., Shed, G. and Devasia, S., 2001, ‘Creep, Hysteresis and Vibration Compensation for Piezo Actuators: Atomic Force Microscopy Application,’ Journal of Dynamic Systems Measurements and Controls, vol. 123, issue. 1, pp. 35-43.
[24] Malvern, L.E., (ed) 1969, ‘Introduction to the Mechanics of a Continuous Medium,’ Prentice Hall, Englewood Cli s, NJ, Ch. 6, pp. 313-319. [25] Basedow, R. and Cocks, T, ‘Piezoelectric Ceramic Displacement Characteristics at Low Frequencies,’ Journal of Physics E: Engineering Scienti c Instruments, vol. 13, pp. 840-844.
[26] Vieira, S., 1986, ‘The Behaviour and Calibration of some Piezoelectric Ceramics used in the STM,’ IBM Journal of Research and Development, vol. 30, issue 5, pp. 553-556.
[27] Ru, C. and Sun, L., 2005, ‘Hysteresis and Creep Compensation for Piezoelectric Actuator in Open-Loop Operation,’ Sensors and Actuators A: Physical, vol. 122, issue. 1, 2005, pp. 124- 130.
[28] Song, D. and Li, C., 1999, ‘Modeling of Piezo Actuators Nonlinear and Frequency Dependent Dynamics,’ Mechatronics, vol. 9, issue. 4, pp. 391-410.
[29] Banning, R., de Koning, W.L., Adriaens, H. and Koops, R., 2001, ‘State Space Analysis and Identi cation for a Class of Hysteretic Systems,’ Automatica, vol. 37, pp. 1883-1892.
[30] Nalluri, S. K., & Parasaram, V. K. B. (2015). Automating Software Builds with Jenkins: Design Patterns and Failure Handling. International Journal of Technology, Management and Humanities, 1(01), 16-33. https://doi.org/10.21590/ijtmh.01.02.03
[31] Yeh, T-J., Lu, S-W. and Wu, T-Y., 2006, ‘Modeling and Identi cation of Hysteresis in Piezoelectric Actuators,’ Journal of Dynamic Systems, Measurement and Control, vol. 128, pp. 189-196.
[32] Qin, Y. and Jia, R., 2018, ‘Adaptive Hysteresis Compensation of Piezoelectric Actuator using Direct Inverse Modeling Approach,’ Micro and Nano Letters, vol. 13, issue. 2, pp. 180-183
[33] Parali, L., Sari, A., Kilic, U., Sahin, O. and Pechousek, J., 2017, ‘Arti cial Neural Network Modeling of Piezoelectric Actuator Vibration using Laser Displacement Sensor,’ Journal of Electrical Engineering, vol. 68, issue. 5, pp. 371-377.
[34] Yong, Y.K., Aphale, S.S. and Moheimani, R., 2009, ‘Design, Identi cation and Control of Flexural based XY stage for Fast Nanopositioning,’ IEEE Transaction on Nanotechnology, vol. 8, issue. 1, pp. 46-52.